Event
- Event ID
- 606
- Quality
- Description
This incident occurred at CVD (coating vapour deposition) equipment. During operation, a vacuum pump for air discharging was turned on and by mistake silane and hydrogen gases were allowed to flow into the CVD equipment. This caused the gases to enter the air discharging pipeline made of PVC (poly-vinyl chloride), which took fire.
- Event Initiating system
- Classification of the physical effects
- Hydrogen Release and Ignition
- Nature of the consequences
- fire
- Macro-region
- Asia
- Country
- Japan
- Date
- Component involved
- compressor / booster / pump
- Failure mode
- erroneous release & ignition
- Initiating cause
- wrong operation
- Root CAUSE analysis
The INITIATING cause for the production of the flammable gas mixture was a wrong operation of the gas flows. The root cause of this wrong operation is unknown.
- Root causes
- Date entry in HIAD
- 01/01/2020
Facility
- Application
- Chemical industry
- Sub-application
- Coating production
- Hydrogen supply chain stage
- All components affected
CVD reactor
- Location type
- Confined
- Location
- industrial area
- Operational condition
Emergency & Consequences
- Number of fatalities
- 0
- Number of injured persons
- 0
In-depth data
- Release type
- gas mixture
- Involved substances (% vol)
- H2,
silane - Probable IGNITION SOURCE
References
- Sources categories
- KHK
- Reference & weblink
High Pressure Gas Accident Cases Database of the KHK (High Pressure Gas Safety Association):
https://www.khk.or.jp/public_information/incident_investigation/hpg_inc…
(accessed May 2025)The first entry in HIAD was coming from RISCAD, which is now closed.
